Photonic crystal MEMS combines micro-mechanical deformation with optical resonance. Small structural changes can shift optical response, enabling sensitive pressure, displacement, acceleration or biochemical sensing concepts.
Multiphysics concept
The mechanical model calculates deformation, stress or displacement while the electromagnetic or wave-optics model evaluates resonance or transmission changes.
Geometry choices
Research can use cavities, defect waveguides, photonic crystal slabs or mechanically tunable gaps. The geometry should connect a physical stimulus to an optical observable.
COMSOL workflow
A parameter sweep can link load, displacement and refractive-index changes to resonance wavelength, Q-factor, transmission or sensitivity.
Potential novelty
Novel cavity topology, enhanced Q-factor, temperature compensation, multi-parameter sensing or MEMS actuation strategies can strengthen the study.
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